Materials and fabrication sequences for water soluble silicon integrated circuits at the 90nm node

نویسندگان

  • Lan Yin
  • Carl Bozler
  • Daniel V. Harburg
  • Fiorenzo Omenetto
  • John A. Rogers
چکیده

Articles you may be interested in Fully complementary metal-oxide-semiconductor compatible nanoplasmonic slot waveguides for silicon electronic photonic integrated circuits Appl. Compact models considering incomplete voltage swing in complementary metal oxide semiconductor circuits at ultralow voltages: A circuit perspective on limits of switching energy Monolithically integrated low-loss silicon photonic wires and three-dimensional tapered couplers fabricated by self-profile transformation Appl. Hybrid carbon nanotube-silicon complementary metal oxide semiconductor circuits Dry etching of amorphous-Si gates for deep sub-100 nm silicon-on-insulator complementary metal–oxide semiconductor J.

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تاریخ انتشار 2015